Open AccessFabrication and characterization of high quality GeSbSe reflowed and etched ring resonators
Author(s) -
Michael Grayson,
Bo Xu,
Thariq Shanavas,
Mo Zohrabi,
Kyuyoung Bae,
Juliet T. Gopinath,
Won Park
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.468249
Subject(s) - resonator , materials science , electron beam lithography , optics , fabrication , scattering , lithography , split ring resonator , optoelectronics , surface roughness , surface finish , photolithography , resist , layer (electronics) , composite material , medicine , physics , alternative medicine , pathology