Open AccessMulti-layer inverse design of vertical grating couplers for high-density, commercial foundry interconnects
Author(s) -
Alec M. Hammond,
Joel B. Slaby,
Michael J. Probst,
Stephen E. Ralph
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.466015
Subject(s) - grating , optics , materials science , extinction ratio , polarization (electrochemistry) , optoelectronics , wavelength , physics , chemistry