Open AccessMicroflow multi-layer diffraction optical element processed by hybrid manufacturing technology
Author(s) -
Mingyue Tan,
Long Huang,
Jiayi Cao,
Han Zhang,
Shaoqing Zhao,
Minzhe Liu,
Zhongqing Jia,
Ruizhan Zhai,
Hua Liu
Publication year - 2022
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.464192
Subject(s) - optics , materials science , diffraction efficiency , diffraction , achromatic lens , femtosecond , optoelectronics , digital micromirror device , lithography , photoresist , maskless lithography , diffraction grating , chromatic aberration , laser , layer (electronics) , chromatic scale , electron beam lithography , resist , nanotechnology , physics
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