Open AccessOptical singularity assisted method for accurate parameter detection of step-shaped nanostructure in coherent Fourier scatterometry
Author(s) -
Xiujie Dou,
Changjun Min,
Yuquan Zhang,
Silvania F. Pereira,
Xiaocong Yuan
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.462045
Subject(s) - optics , fourier transform , nanostructure , singularity , scattering , metrology , beam (structure) , materials science , physics , nanotechnology , mathematics , mathematical analysis , quantum mechanics