Open AccessTwo-dimensional measurement of resonance in MEMS resonators using stroboscopic differential interference contrast microscopy
Author(s) -
Mirai Iimori,
Ya Zhang
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.460769
Subject(s) - resonator , optics , differential interference contrast microscopy , microscopy , materials science , stroboscope , microelectromechanical systems , resonance (particle physics) , optoelectronics , physics , particle physics
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