Open AccessIntegrated 1 × 3 MEMS silicon nitride photonics switch
Author(s) -
Suraj Sharma,
Niharika Kohli,
Jonathan Brière,
Frédéric Nabki,
Michel Ménard
Publication year - 2022
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.460533
Subject(s) - microfabrication , microelectromechanical systems , materials science , insertion loss , silicon nitride , photonics , optical switch , optoelectronics , silicon on insulator , optics , silicon photonics , silicon , fabrication , physics , medicine , alternative medicine , pathology