Improvement of imaging performance of silicon micropore X-ray optics by ultra long-term annealing | Zendy

Aoto Fukushima | Zendy; Daiki Ishi | Zendy; Yuichiro Ezoe | Zendy; Kumi Ishikawa | Zendy; Masaki Numazawa | Zendy; Sae Sakuda | Zendy; Tomoki Uchino | Zendy; A. Inagaki | Zendy; Yôko Ueda | Zendy; Hiromi Morishita | Zendy; Luna Sekiguchi | Zendy; Takatoshi Murakawa | Zendy; Yukine Tsuji | Zendy; Kazuhisa Mitsuda | Zendy; Yoshiaki Kanamori | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Improvement of imaging performance of silicon micropore X-ray optics by ultra long-term annealing

Author(s) -

Aoto Fukushima,

Daiki Ishi,

Yuichiro Ezoe,

Kumi Ishikawa,

Masaki Numazawa,

Sae Sakuda,

Tomoki Uchino,

A. Inagaki,

Yôko Ueda,

Hiromi Morishita,

Luna Sekiguchi,

Takatoshi Murakawa,

Yukine Tsuji,

Kazuhisa Mitsuda,

Yoshiaki Kanamori

Publication year - 2022

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.459774

Subject(s) - full width at half maximum , optics , wafer , materials science , deep reactive ion etching , x ray optics , annealing (glass) , angular resolution (graph drawing) , image resolution , silicon , optoelectronics , x ray , etching (microfabrication) , physics , reactive ion etching , nanotechnology , mathematics , layer (electronics) , combinatorics , composite material

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research