Open AccessIon implantation of tunnel junction as a method for defining the aperture of III-nitride-based micro-light-emitting diodes
Author(s) -
Julia Slawinska,
G. Muzioł,
M. Siekacz,
Henryk Turski,
Mateusz Hajdel,
Mikołaj Żak,
Anna Feduniewicz-Żmuda,
G. Staszczak,
C. Skierbiszewski
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.458950
Subject(s) - light emitting diode , materials science , optoelectronics , diode , molecular beam epitaxy , ion implantation , nitride , quantum well , epitaxy , focused ion beam , optics , quantum efficiency , wavelength , aperture (computer memory) , tunnel junction , ion , nanotechnology , chemistry , laser , quantum tunnelling , physics , layer (electronics) , acoustics , organic chemistry