Open AccessEfficient multi-step coupling between Si3N4 waveguides and CMOS plasmonic ferroelectric phase shifters in the O-band
Author(s) -
Dimitrios Chatzitheocharis,
Dimitra Ketzaki,
Georgios Patsamanis,
E. Chatzianagnostou,
K. Vyrsokinos
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.457484
Subject(s) - plasmon , materials science , optoelectronics , ferroelectricity , waveguide , optics , dielectric , physics