Open AccessDesign of a metal-based deformable mirror for orthogonal beam deflection and highly dynamic beam oscillation
Author(s) -
Paul Böttner,
Thomas Peschel,
Aoife Brady,
Daniel Heinig,
Matthias Goy,
Ramona Eberhardt,
Stefan Nolte
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.457364
Subject(s) - optics , finite element method , diffraction , dynamic range , deflection (physics) , modal analysis , materials science , vibration , physics , acoustics , thermodynamics
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