Open AccessDesign of a metal-based deformable mirror for orthogonal beam deflection and highly dynamic beam oscillation
Author(s) -
Paul Böttner,
Thomas Peschel,
Aoife Brady,
Daniel Heinig,
Matthias Goy,
Ramona Eberhardt,
Stefan Nolte
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.457364
Subject(s) - optics , diffraction , finite element method , dynamic range , modal analysis , deflection (physics) , materials science , beam (structure) , vibration , physics , acoustics , thermodynamics