Open AccessCorrection of a digital micromirror device lithography system for fabrication of a pixelated liquid crystal micropolarizer array
Author(s) -
Chang Liu,
Shiyuan Zhang,
Yuqing Liu,
Meiying Lu,
Weijie Cao,
Long Huang,
Han Zhang,
Zifeng Lu,
Quanquan Mu,
Hua Liu
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.453800
Subject(s) - polarizer , optics , digital micromirror device , fabrication , lithography , materials science , pixel , liquid crystal , polarization (electrochemistry) , optoelectronics , physics , birefringence , medicine , chemistry , alternative medicine , pathology