Open AccessEffect of annealing on properties and performance of HfO2/SiO2 optical coatings for UV-applications
Author(s) -
Matthias Falmbigl,
Kyle Godin,
Jason George,
Christian Mühlig,
Binyamin Rubin
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.453345
Subject(s) - materials science , sputtering , optical coating , coating , annealing (glass) , fluence , laser , optoelectronics , optics , ultraviolet , thin film , nanotechnology , composite material , physics