Open AccessAccuracy improvement of linear stages using on-machine geometric error measurement system and error transformation model
Author(s) -
Yindi Cai,
Luhui Wang,
Yang Liu,
Chang Li,
KuangChao Fan
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.453111
Subject(s) - computer science , transformation (genetics) , focus (optics) , position (finance) , point (geometry) , observational error , system of measurement , orientation (vector space) , algorithm , optics , mathematics , geometry , physics , biochemistry , chemistry , statistics , finance , astronomy , economics , gene