Open AccessLarge-range and high-precision autofocus method based on an annular DOE for a laser direct writing system
Author(s) -
Jialin Du,
Fanxing Li,
Fuping Peng,
Simo Wang,
Wei Yan
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.449611
Subject(s) - autofocus , optics , focus (optics) , laser , range (aeronautics) , computer science , noise (video) , materials science , artificial intelligence , physics , image (mathematics) , composite material