Open AccessStudy of photo-ionization and thermal effects on the interaction of a nanosecond extreme ultraviolet laser with copper
Author(s) -
Huaiyu Cui,
Lei Li,
Dongdi Zhao,
Bin An,
Ya Bai,
Zenghua Fan,
Yijun Zhao
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.448698
Subject(s) - nanosecond , extreme ultraviolet , materials science , laser , ionization , optics , extreme ultraviolet lithography , copper , ultraviolet , thermal , irradiation , atomic physics , optoelectronics , physics , ion , meteorology , nuclear physics , metallurgy , quantum mechanics