Open AccessSimultaneous film thickness and refractive index measurement using a constrained fitting method in a white light spectral interferometer
Author(s) -
Lin Yuan,
Tong Guo,
Dawei Tang,
Haitao Liu,
Xinyuan Guo
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.447830
Subject(s) - optics , refractive index , white light interferometry , interferometry , materials science , dispersion (optics) , wavelength , astronomical interferometer , physics