Open AccessImage quality improvement for optical imaging interferometric microscopy
Author(s) -
Preyom Dey,
Alexander Neumann,
S. R. J. Brueck
Publication year - 2021
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.444142
Subject(s) - optics , image quality , interferometry , microscopy , image resolution , resolution (logic) , digital holographic microscopy , calibration , spatial frequency , image processing , materials science , computer science , image (mathematics) , artificial intelligence , physics , quantum mechanics
Imaging interferometric microscopy (IIM) is an optical microscopy resolution enhancement technique involving combining multiple sub-images to increase resolution. Several image reconstruction challenges can degrade the image quality including the frequency, phase deviations between sub-images, and maintenance of a uniform frequency response across the entire space. This work proposes methods to address these issues. The methods are first compared in simulation using a Manhattan structure of 260-nm critical dimension with 2-µm-pitch calibration grating on the sides. The proposed correction methods are then applied to the experimental results and found to be effective in improving the image quality of IIM.