Open AccessMicro-fabricated vapor cells with sealed Rb atoms by distillation at wafer level and two-step bonding for miniature atomic clocks
Author(s) -
Hitoshi Nishino,
Yasubumi Furuya,
Takahito Ono
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.442859
Subject(s) - wafer , materials science , miniaturization , seal (emblem) , atomic clock , allan variance , outgassing , anodic bonding , metrology , buffer gas , atom (system on chip) , vapor pressure , optoelectronics , optics , nanotechnology , chemistry , standard deviation , art , laser , statistics , physics , mathematics , organic chemistry , computer science , visual arts , embedded system