Large-area mid-infrared broadband absorbers based on spiral ITO resulting from the combination of two different broadening absorption methods

A large-area mid-infrared broadband absorber is proposed in this paper. The absorber is a spiral ITO structure grown on a hexagonal lattice arrangement of silicon nanopillars by using a glancing angle deposition method. The experimental results show that when the heights of the silicon nanopillars are 1.7 µm and the number of rotation depositions is n = 5, that is, the rotation angle is 150 degrees, the absorber absorbs more than 81% of electromagnetic waves in the 2.5-6 µm spectral range. In the atmospheric window of 3-5 µm, the integral absorption reaches 96%. The experimental results also show that the absorbing ability of the ITO structure in the mid-infrared atmospheric window is significantly stronger than that of the structure composed of silver under the same preparation conditions. The main reasons for the broadband absorption are that the spiral ITO structure has resonant absorption of electromagnetic waves with different wavelengths in the empty cavity regions with different sizes, and ITO has longer penetration depths than noble metals in the mid-infrared band, which brings about stronger broadband absorption. The combination of the two leads to a broadening of the total absorption spectrum. The higher heights of the silicon nanopillars enhance absorption further. Additionally, the loose spiral ITO distributions indicate lower mean plasma concentration and then increase penetration depths further, resulting in stronger light absorption. Such a large-area mid-infrared absorption structure with a simple preparation method has potential applications in mid-infrared cloaking and sensing.