Open AccessAutomated optical monitoring wavelength selection for thin-film filters
Author(s) -
Janis Zideluns,
Fabien Lemarchand,
Detlef Arhilger,
Harro Hagedorn,
Julien Lumeau
Publication year - 2021
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.439033
Subject(s) - wavelength , optics , interference (communication) , optical filter , computer science , sensitivity (control systems) , selection (genetic algorithm) , process (computing) , materials science , electronic engineering , telecommunications , physics , artificial intelligence , engineering , channel (broadcasting) , operating system
In this paper we study the wavelength selection process for optical monitoring of thin film filters. We first discuss the technical limitations of monitoring systems as well as the criteria defining the sensitivity of different wavelengths to thickness errors. We then present an approach that considers the best monitoring wavelength for each individual layer with a monitoring strategy selection process that can be fully automated. We finally validate experimentally the proposed approach on several optical filters of increasing complexity. Optical interference filters with close to theoretical performances are demonstrated.