Open AccessLow-noise Kerr frequency comb generation with low temperature deuterated silicon nitride waveguides
Author(s) -
Zeru Wu,
Yanfeng Zhang,
Shihao Zeng,
Jiaqi Li,
Yaozu Xie,
Yujie Chen,
Siyuan Yu
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.438436
Subject(s) - plasma enhanced chemical vapor deposition , materials science , resonator , silicon nitride , optoelectronics , optics , photonics , silicon , physics
We report very low-loss deuterated silicon nitride (SiN x :D) micro-ring resonators fabricated by back-end CMOS compatible low-temperature plasma-enhanced chemical vapor deposition (PECVD) without annealing. Strong confinement micro-ring resonators with a quality factor of > 2 million are achieved, corresponding to a propagation loss in the 1460-1610 nm wavelength range of ∼ 0.17 dB/cm. We further report the generation of low-noise coherent Kerr microcomb states including different perfect soliton crystals (PSC) in PECVD SiN x :D micro-ring resonators. These results manifest the promising potential of the back-end CMOS compatible SiN x :D platform for linear and nonlinear photonic circuits that can be co-integrated with electronics.