Open AccessHigh-Q, submicron-confined chalcogenide microring resonators
Author(s) -
Zhen Yang,
Rizhen Zhang,
Zhiyuan Wang,
Peipeng Xu,
Wei Zhang,
Zhe Kang,
Jiajiu Zheng,
Shixun Dai,
Rongping Wang,
Arka Majumdar
Publication year - 2021
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.434808
Subject(s) - resonator , chalcogenide , optics , electron beam lithography , chalcogenide glass , materials science , q factor , figure of merit , optoelectronics , lithography , refractive index , waveguide , nonlinear optics , photonics , etching (microfabrication) , dry etching , radius , physics , laser , nanotechnology , resist , computer security , layer (electronics) , computer science
We demonstrate high quality (Q) factor microring resonators in high index-contrast GeSbSe chalcogenide glass waveguides using electron-beam lithography followed by plasma dry etching. A microring resonator with a radius of 90 μm shows an intrinsic Q factor of 4.1 × 10 5 in the telecom band. Thanks to the submicron waveguide dimension, the effective nonlinear coefficient was determined to be up to ∼110 W -1 m -1 at 1550 nm, yielding a larger figure-of-merit compared with previously reported submicron chalcogenide waveguides. Such a high Q factor, combined with the large nonlinear coefficient and high confinement, shows the great potential of the GeSbSe microring resonator as a competitive platform in integrated nonlinear photonics.
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom