Open AccessHigh-Q, submicron-confined chalcogenide microring resonators
Author(s) -
Zhen Yang,
Rizhen Zhang,
Zhiyuan Wang,
Peipeng Xu,
Zhe Kang,
Jiajiu Zheng,
Shixun Dai,
Rongping Wang,
Arka Majumdar
Publication year - 2021
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.434808
Subject(s) - resonator , chalcogenide , optics , electron beam lithography , chalcogenide glass , materials science , q factor , figure of merit , optoelectronics , lithography , refractive index , waveguide , nonlinear optics , photonics , etching (microfabrication) , dry etching , radius , physics , laser , nanotechnology , resist , computer security , layer (electronics) , computer science
We demonstrate high quality (Q) factor microring resonators in high index-contrast GeSbSe chalcogenide glass waveguides using electron-beam lithography followed by plasma dry etching. A microring resonator with a radius of 90 μm shows an intrinsic Q factor of 4.1 × 10 5 in the telecom band. Thanks to the submicron waveguide dimension, the effective nonlinear coefficient was determined to be up to ∼110 W -1 m -1 at 1550 nm, yielding a larger figure-of-merit compared with previously reported submicron chalcogenide waveguides. Such a high Q factor, combined with the large nonlinear coefficient and high confinement, shows the great potential of the GeSbSe microring resonator as a competitive platform in integrated nonlinear photonics.