Open AccessTime-resolved ultrafast laser ablation dynamics of thin film indium tin oxide
Author(s) -
Goran Hallum,
Dorian Kürschner,
David Redka,
Dorothée Niethammer,
Wolfgang Schulz,
Heinz P. Huber
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.434515
Subject(s) - materials science , fluence , picosecond , optics , nanosecond , ablation , indium tin oxide , ultrashort pulse , spallation , laser , thin film , laser ablation , irradiation , optoelectronics , nanotechnology , physics , quantum mechanics , aerospace engineering , neutron , nuclear physics , engineering
The interaction of ultrashort laser pulses above the ablation threshold of thin-film indium tin oxide (ITO) is examined with pump-probe microscopy. We are able to observe photomechanical spallation at delay times of hundreds of picoseconds, which plays a stronger role near the ablation threshold of 0.17 J/cm 2 . A phase explosion may also be observed at tens of picoseconds, playing a stronger role for increasing peak fluences. As one exceeds the material removal efficiency maximum near 0.6 J/cm 2 , a second spallation is observable in the center of the irradiated spot at a delay time of one nanosecond and corresponds to a crater depth of 50 nanometers. No discernable ridge formation has been observed. We recommend an industrial processing window of at least two pulses per position with a peak fluence between 0.6-1.0 J/cm 2 .