Open AccessSelf-compensation method for dual-beam roll angle measurement of linear stages
Author(s) -
Fan Yang,
Zhifeng Lou,
Yubin Huang,
KuangChao Fan
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.433387
Subject(s) - robustness (evolution) , optics , compensation (psychology) , ray tracing (physics) , tracing , laser beams , beam (structure) , computer science , laser , physics , psychology , biochemistry , chemistry , psychoanalysis , gene , operating system
In this paper, a self-compensation method for improving the accuracy of roll angle measurement of a linear stage caused by the non-parallelism of dual-beam due to time-dependent mechanical deformation of the support is proposed and integrated into a 5-DOF sensor to verify the feasibility. The non-parallelism between two laser beams is online real-time monitored by a pair of small autocollimator units. Through the ray-tracing analysis, the method to separate the roll angle of the moving stage and non-parallelism induced roll error is determined. A series of experiments under different supporting forces and ambient conditions have been carried out. The compensated P-V values of the roll angles are all within ±4 arc-sec, no matter how bad the originally measured value of the linear stage is. The average improvement of about 95% is significant. The effectiveness and robustness of the proposed measurement system in the changing environment are verified.