Semi-transparent 3D microelectrodes buried in fused silica for photonics applications | Zendy

Surya S. K. Guduru | Zendy; Sadir Gabriele Bucella | Zendy; Silvio Bonfadini | Zendy; Krishna Chaitanya Vishnubhatla | Zendy; Mario Caironi | Zendy; Luigino Criante | Zendy

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Semi-transparent 3D microelectrodes buried in fused silica for photonics applications

Author(s) -

Surya S. K. Guduru,

Sadir Gabriele Bucella,

Silvio Bonfadini,

Krishna Chaitanya Vishnubhatla,

Mario Caironi,

Luigino Criante

Publication year - 2021

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.433330

Subject(s) - microfabrication , materials science , femtosecond , microfluidics , microelectrode , optoelectronics , photonics , rapid prototyping , electrode , laser , lab on a chip , optics , chip , nanotechnology , fabrication , computer science , medicine , telecommunications , chemistry , physics , alternative medicine , pathology , composite material

We report the realization of semi-transparent 3D microelectrodes fully embedded in a fused silica substrate by a combination of femtosecond laser microfabrication and inkjet printing. We also demonstrate the application of such electrodes in a proof-of-concept lab-on-chip device configuration, which acts as a liquid crystal molecular polarization rotator using on-chip electric fields. This work constitutes a first of its kind synergy between two widely used microfabrication techniques, femtosecond laser and inkjet, demonstrating a very efficient integration of optical, electrical and microfluidic components in a unique platform and thus enabling fast prototyping of 3D structured electro-optic lab-on-chips.

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