Open AccessSemi-transparent 3D microelectrodes buried in fused silica for photonics applications
Author(s) -
Surya S. K. Guduru,
Sadir Gabriele Bucella,
Silvio Bonfadini,
Krishna Chaitanya Vishnubhatla,
Mario Caironi,
Luigino Criante
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.433330
Subject(s) - microfabrication , materials science , femtosecond , microfluidics , microelectrode , optoelectronics , photonics , rapid prototyping , electrode , laser , lab on a chip , optics , chip , nanotechnology , fabrication , computer science , medicine , telecommunications , chemistry , physics , alternative medicine , pathology , composite material
We report the realization of semi-transparent 3D microelectrodes fully embedded in a fused silica substrate by a combination of femtosecond laser microfabrication and inkjet printing. We also demonstrate the application of such electrodes in a proof-of-concept lab-on-chip device configuration, which acts as a liquid crystal molecular polarization rotator using on-chip electric fields. This work constitutes a first of its kind synergy between two widely used microfabrication techniques, femtosecond laser and inkjet, demonstrating a very efficient integration of optical, electrical and microfluidic components in a unique platform and thus enabling fast prototyping of 3D structured electro-optic lab-on-chips.