Open AccessIndependent contribution of optical attenuation length in ultrafast laser-induced structural change
Author(s) -
Takehisa Shibuya,
Kazuyuki Sakaue,
Hiroshi Ogawa,
Daisuke Satoh,
Thanh-Hung Dinh,
Masahiko Ishino,
Masakazu Washio,
Takeshi Higashiguchi,
Masaharu Nishikino,
Akira Kon,
Yuya Kubota,
Yuichi Inubushi,
Shigeki Owada,
Yohei Kobayashi,
R. Kuroda
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.432130
Subject(s) - femtosecond , materials science , irradiation , attenuation , optics , laser , ultrashort pulse , wavelength , amorphous solid , attenuation coefficient , pulse duration , optoelectronics , physics , chemistry , crystallography , nuclear physics
Although laser irradiation with femtosecond pulses is known to generate crystallization and morphological changes, the contribution of optical parameters to material changes is still in discussion. Here, we compare two structures irradiated near Si-L2,3 edges by an extreme ultraviolet femtosecond pulse. Our result implies that, despite the femtosecond irradiation regime, these values of the optical attenuation length between the wavelengths of 10.3-nm and 13.5-nm differ by one order of magnitude. From the structural comparison, the original crystalline state was maintained upon irradiation at 13.5-nm, on the other hand, transition to an amorphous state occurred at 10.3-nm. The difference in optical attenuation length directly influence to the decision of material crystallization or morphological changes, even if the irradiation condition is under the femtosecond regime and same pulse duration. Our result reveals the contribution of optical attenuation length in ultrafast laser-induced structural change.