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Influence of seed layers on the reflectance of sputtered aluminum thin films
Author(s) -
P. Schmitt,
Sven Stempfhuber,
Nadja Felde,
Adriana Szeghalmi,
Norbert Kaiser,
Andreas Tünnermann,
Stefan Schwinde
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.428343
Subject(s) - materials science , aluminium , reflectivity , thin film , fabrication , optics , evaporation , layer (electronics) , optical coating , degradation (telecommunications) , optoelectronics , metallurgy , composite material , nanotechnology , medicine , telecommunications , physics , alternative medicine , pathology , computer science , thermodynamics
The fabrication of highly reflective aluminum coatings is still an important part of current research due to their high intrinsic reflectivity in a broad spectral range. By using thin seed layers of Cu, CuO x , Cr, CrO x , Au, and Ag, the morphology of sputtered (unprotected) aluminum layers and, consequently, their reflectance can be influenced. In this long-term study, the reflectance behavior was measured continuously using spectrophotometry. Particular seed layer materials enhance the reflectance of aluminum coatings significantly and reduce their long-term degradation. Combining such seed layers with evaporation processes and suitable protective layers could further increase the reflectance of aluminum coatings.

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