Open AccessSi microring resonator optical switch based on optical phase shifter with ultrathin-InP/Si hybrid metal-oxide-semiconductor capacitor
Author(s) -
Shuhei Ohno,
Qiang Li,
N. Sekine,
He Tang,
S. Monfray,
F. Bœuf,
Kasidit Toprasertpong,
Shinichi Takagi,
Mitsuru Takenaka
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.424963
Subject(s) - materials science , optical switch , phase shift module , optoelectronics , insertion loss , photonic integrated circuit , resonator , wavelength division multiplexing , semiconductor , photonics , optics , silicon photonics , wavelength , physics
We propose a microring resonator (MRR) optical switch based on III-V/Si hybrid metal-oxide-semiconductor (MOS) optical phase shifter with an ultrathin InP membrane. By reducing the thickness of the InP membrane, we can reduce the insertion loss of the phase shifter, resulting in a high-quality-factor (Q-factor) MRR switch. By optimizing the device structure using numerical analysis, we successfully demonstrated a proof-of-concept MRR optical switch. The optical switch exhibits 0.3 pW power consumption for switching, applicable to power-efficient, thermal-crosstalk-free, Si programmable photonic integrated circuits (PICs) based on wavelength division multiplexing (WDM).