Open AccessDual slot-mode NOEM phase shifter
Author(s) -
Reza Baghdadi,
Michael N. Gould,
Shashank Gupta,
Mykhailo Tymchenko,
Darius Bunandar,
Carl Ramey,
Nicholas C. Harris
Publication year - 2021
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.423949
Subject(s) - phase shift module , insertion loss , photonics , cmos , materials science , silicon photonics , optoelectronics , transistor , true time delay , bandwidth (computing) , optics , voltage , electrical engineering , physics , computer science , phased array , telecommunications , engineering , antenna (radio)
Photonic system component counts are increasing rapidly, particularly in CMOS-compatible silicon photonics processes. Large numbers of cascaded active photonic devices are difficult to implement when accounting for constraints on area, power dissipation, and response time. Plasma dispersion and the thermo-optic effect, both available in CMOS-compatible silicon processes, address a subset of these criteria. With the addition of a few back-end-of-line etch processing steps, silicon photonics platforms can support nano-opto-electro-mechanical (NOEM) phase shifters. Realizing NOEM phase shifters that operate at CMOS-compatible voltages (≤ 1.2 V) and with low insertion loss remains a challenge. Here, we introduce a novel NOEM phase shifter fabricated alongside 90 nanometer transistors that imparts 5.63 radians phase shift at 1.08 volts bias over an actuation length of 25μm with an insertion loss of less than 0.04 dB and 3 dB bandwidth of 0.26 MHz.