Open AccessDouble-sided optical coating of strongly curved glass by atomic layer deposition
Author(s) -
Ling-Shan Gao,
Qing-Yuan Cai,
Ertao Hu,
Jing Zhou,
Yaopeng Li,
Hai-Han Luo,
Baojian Liu,
YuXiang Zheng,
Dingquan Liu
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.423085
Subject(s) - atomic layer deposition , materials science , wavelength , coating , optics , layer (electronics) , deposition (geology) , circumference , analytical chemistry (journal) , composite material , optoelectronics , chemistry , paleontology , physics , geometry , mathematics , sediment , biology , chromatography
A reaction chamber of atomic layer deposition (ALD) was developed for simultaneous coating on the inner and outer surfaces of a large-size and strongly curved glass bowl. The inner surface ALD process was in a showerhead reaction mode and the outer surface ALD process was in a cross-flow reaction mode. Blue reflection (BR) film of 400 nm wavelength and broadband antireflection (BBAR) film of 400-700 nm wavelength were coated on different glass bowls by ALD. The spectral uniformity of both coated bowls was studied. The measured spectra at multiple positions of the glass bowl with the BBAR coating show better spectral uniformity along the circumference than the depth. The spectral deviation is mainly caused by the non-uniformity of the film on the outer surface (<±3%), and the film on the inner surface has good uniformity along both the circumference and the depth (<±0.7%). The growth rate of the outer film was reduced by 10% on average compared to that of the inner film due to the different gas flow mode.