Open AccessSilicon nitride assisted 1×64 optical phased array based on a SOI platform
Author(s) -
Kaixin Wang,
Yafei Wang,
Litao Jia,
Yan Cai,
Weisheng Yue,
Mingbin Yu
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.420921
Subject(s) - silicon on insulator , materials science , common emitter , silicon nitride , optoelectronics , optics , silicon , grating , waveguide , hybrid silicon laser , silicon photonics , phased array optics , phased array , antenna (radio) , electrical engineering , physics , engineering
We demonstrate a 1×64 optical phased array (OPA) based on a silicon on insulator (SOI) platform with integrated silicon nitride. The input port of the OPA is fabricated using a silicon nitride waveguide due to its advantage of allowing more optical power. The phase shifter is a silicon waveguide with heater because of the higher thermo-optic coefficient of silicon. And a double layer silicon nitride assisted grating is used in the emitter to reduce the emission strength and then increase the length of emitter to reduce the spot size. The length of the grating emitter is 1.5 mm and the measured field of view of this optical phased array is 35.5°×22.7° with spot size of 0.69°×0.075°.