Silicon nitride assisted 1×64 optical phased array based on a SOI platform | Zendy

Qing Wang | Zendy; Shuxiao Wang | Zendy; Lianxi Jia | Zendy; Yan Cai | Zendy; Wencheng Yue | Zendy; Mingbin Yu | Zendy

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Silicon nitride assisted 1×64 optical phased array based on a SOI platform

Author(s) -

Qing Wang,

Shuxiao Wang,

Lianxi Jia,

Yan Cai,

Wencheng Yue,

Mingbin Yu

Publication year - 2021

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.420921

Subject(s) - silicon on insulator , materials science , silicon nitride , common emitter , optoelectronics , optics , silicon , grating , waveguide , hybrid silicon laser , phased array optics , silicon photonics , phased array , antenna (radio) , telecommunications , physics , computer science

We demonstrate a 1×64 optical phased array (OPA) based on a silicon on insulator (SOI) platform with integrated silicon nitride. The input port of the OPA is fabricated using a silicon nitride waveguide due to its advantage of allowing more optical power. The phase shifter is a silicon waveguide with heater because of the higher thermo-optic coefficient of silicon. And a double layer silicon nitride assisted grating is used in the emitter to reduce the emission strength and then increase the length of emitter to reduce the spot size. The length of the grating emitter is 1.5 mm and the measured field of view of this optical phased array is 35.5°×22.7° with spot size of 0.69°×0.075°.

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