Open AccessLarge-area all-dielectric metasurface fabricated by an anodized aluminum oxide template
Author(s) -
Bintao Du,
Zhen Wu,
Jun Xia,
Jun Wu,
Guodong Tong,
Hao Zhang
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.419369
Subject(s) - materials science , fabrication , electron beam lithography , lithography , anodizing , dielectric , optoelectronics , optics , evaporation , substrate (aquarium) , nanotechnology , resist , aluminium , medicine , oceanography , alternative medicine , physics , layer (electronics) , pathology , geology , metallurgy , thermodynamics
Transmissive metasurfaces formed by high-index dielectric materials have received great attention due to its potential in holograms, deflectors, beam converters, and flat lenses. However, a key challenge of all-dielectric metasurfaces is the limited scale and high cost in fabrication, such as electron beam lithography (EBL) and focused ion beam (FIB) lithography. In this paper, for the first time to our knowledge, an anodized aluminum oxide (AAO) template is combined with titanium dioxide (TiO 2 ) metasurface fabrication with advantages of large area (>2cm 2 ) and low cost. Using the ordered anodized aluminum oxide (AAO) as an evaporation mask, a TiO 2 nanocylinder array is deposited through the AAO mask onto the SiO 2 substrate. Electric and magnetic dipole resonances of TiO 2 metasurface appear in the visible spectrum. Furthermore, we demonstrate the interaction of the CsPbBr 1.5 I 1.5 quantum dot (QD) emission with magnetic dipole (MD) resonance of TiO 2 metasurface. Our results reveal that the metasurface exhibits remarkable photoluminescence (PL) enhancement of 25%. Up to now, a TiO 2 metasurface with 2.25-cm 2 -large area using AAO template method has never been attempted. Different from the metasurfaces fabricated by FIB and EBL, our method offers great ease for large-area metasurface fabrication, which is convenient for metasurface researchers and avoids costly facilities.