Open AccessEfficient and high-throughput ablation of platinum using high-repetition rate radially and azimuthally polarized sub-picosecond laser pulses
Author(s) -
André Loescher,
Paul Oldorf,
Rigo Peters,
W. P. Pallmann,
Bojan Resan,
Fabien Lesparre,
Patrick Beaure d’Augerès,
Xavier Délen,
François Balembois,
Patrick Georges,
Roswitha GiedlWagner,
Ronny De Loor,
Thomas Graf,
Marwan Abdou Ahmed
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.415855
Subject(s) - optics , laser , materials science , polarization (electrochemistry) , amplifier , picosecond , linear polarization , azimuth , laser ablation , laser power scaling , optoelectronics , physics , chemistry , cmos
A highly productive ablation process of 100 nm thick platinum films with a processed area rate of up to 378 cm 2 /min is presented using radially and azimuthally polarized laser beams. This was achieved by developing a laser amplifier generating 757 fs long laser pulses at a maximum average power of 390 W and a repetition rate of 10.6 MHz with adjustable polarization states, i.e., linear, radial, and azimuthal polarization on the work piece. The pulse train emitted from the laser was synchronized to a custom-designed polygon scanner and directed into an application machine.