Open AccessIn-line characterization of nanostructures produced by roll-to-roll nanoimprinting
Author(s) -
Jonas Skovlund Madsen,
Mathias Geisler,
Mikkel Rønne Lotz,
Maksim Zalkovskij,
Brian Bilenberg,
Raimo Korhonen,
Petri Peltonen,
Poul Erik Hansen,
Søren A. Jensen
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.411669
Subject(s) - hyperspectral imaging , metrology , optics , characterization (materials science) , materials science , nanostructure , nanoscopic scale , nanolithography , nanometre , nanotechnology , computer science , physics , fabrication , artificial intelligence , medicine , alternative medicine , pathology
We present an in-line metrology solution for dimensional characterization of roll-to-roll imprinted nanostructures. The solution is based on a scatterometric analysis of optical data from a hyperspectral camera deployed at a production facility, where nanostructures are produced at speeds of 10m/min. The system combines the ease of use of a real-space imaging system with the spectral information used in scatterometry. We present nanoscale dimensional measurements on one-dimensional line gratings with various periods and orientations. The depths of the produced structures are accurately characterized with uncertainties on the scale of a few nanometers. The hyperspectral imaging capabilities of the system can also be used to avoid vibrational effects.