Open AccessDesign routine and characterisation of a biconic deformable metal mirror for focus shifting
Author(s) -
Paul Böttner,
Aoife Brady,
Claudia Reinlein,
Ramona Eberhardt,
Stefan Nolte
Publication year - 2021
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.408748
Subject(s) - optics , deformable mirror , deflection (physics) , actuator , focus (optics) , adaptive optics , wavefront , lens (geology) , curved mirror , active optics , spherical aberration , materials science , physics , computer science , artificial intelligence
This paper describes an opto-mechanical concept of a deformable metal mirror membrane, which can shift the focus position over a large range by use of a single actuator. The core element of the mirror is a diamond turned tulip-shaped membrane, the design is optimized to correct astigmatic aberrations which arise from the use of a curved mirror under a deflection angle. For this purpose, the target mirror surface is biconic. The manufactured mirror was tested with a maximum central deflection of 28 µm and, when used in combination with a 200 mm focal lens, is capable of producing a focus shift of up to 17.9 mm with a resulting wavefront aberration of 238.7 nm RMS error .