Open AccessMonolithically integrated membrane-in-the-middle cavity optomechanical systems
Author(s) -
Graham J. Hornig,
S. Al-Sumaidae,
J. Maldaner,
Lintong Bu,
R. G. DeCorby
Publication year - 2020
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.402031
Subject(s) - finesse , materials science , optics , surface micromachining , optomechanics , wavelength , optoelectronics , membrane , silicon nitride , calibration , fabry–pérot interferometer , silicon , fabrication , resonator , chemistry , physics , medicine , biochemistry , alternative medicine , pathology , quantum mechanics
We describe curved-mirror Fabry-Perot cavities with embedded silicon nitride membranes, fabricated using a monolithic surface-micromachining process. The presence of the suspended membranes was confirmed by confocal microscopy, and their properties were verified through optical studies and thermomechanical calibration of mechanical/vibrational noise spectra measured at room temperature and atmospheric pressure. The cavities exhibit reflectance-limited finesse (F ∼ 10 3 ) and wavelength-scale mode volumes (VM ∼ 10·λ 3 ). The short cavity length (L ∼ 2·λ) results in large optomechanical coupling, which is desirable for numerous applications in sensing and quantum information.