Open AccessUltrafast laser ablation of 10-nm self-supporting membranes by two-beam interference processing
Author(s) -
Yuuki Uesugi,
Ryota Fukushima,
Yuichi Kozawa,
Shunichi Sato
Publication year - 2020
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.400941
Subject(s) - materials science , optics , ultrashort pulse , laser , ablation , nanoengineering , interference (communication) , laser ablation , membrane , femtosecond , beam (structure) , focused ion beam , optoelectronics , nanotechnology , channel (broadcasting) , ion , computer science , computer network , physics , quantum mechanics , aerospace engineering , biology , genetics , engineering
Ultrafast laser ablation was applied to process 10-nm self-supporting membranes. The membranes were processed over tens of square micrometers by single-shot irradiation of two visible laser pulses, followed by the realization of periodic sub-microstructures. The fabricated geometry is dependent on the intensity distribution of the superposed input pulses, providing flexibility and facilitating practical micro- and nanoengineering. Ease of designing the processing parameters and speed of processing are the significant advantages of this method compared to focused ion beam (FIB) milling.