Vertically tapered waveguide spot size converters fabricated via a linewidth controlled grey tone lithography for InP-based photonic integrated circuits | Zendy

O. Salehzadeh | Zendy; M. Vachon | Zendy; Nicaulas Sabourin | Zendy; Siegfried Janz | Zendy; A. J. SpringThorpe | Zendy

Open Access

Vertically tapered waveguide spot size converters fabricated via a linewidth controlled grey tone lithography for InP-based photonic integrated circuits

Author(s) -

O. Salehzadeh,

M. Vachon,

Nicaulas Sabourin,

Siegfried Janz,

A. J. SpringThorpe

Publication year - 2020

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.397489

Subject(s) - materials science , coupling loss , optics , laser linewidth , photonic integrated circuit , tapering , photolithography , electronic circuit , photonics , optoelectronics , fabrication , lithography , waveguide , optical fiber , laser , physics , medicine , computer graphics (images) , alternative medicine , pathology , quantum mechanics , computer science

We report a novel and simple fabrication process to realize vertically tapered spot size converters (SSC) on InP photonic integrated circuits. The vertical tapering was achieved via a linewidth controlled local optical dose variation, leading to a grey tone photoresist profile. The fabricated SSCs are compact, polarization insensitive and demonstrate a very high mode conversion efficiency of 95%. Integrated SSCs improved the overall loss by 5 dB giving a coupling loss as low as 1.3 dB/facet, for a lensed fibre with a mode field diameter of 3.0 µm. A good agreement was found between the fibre-to-fibre optical loss measurements and those predicted from simulations.

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