Open AccessQuasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers
Author(s) -
Thomas Siefke,
Carol Bibiana Rojas Hurtado,
Johannes Dickmann,
Walter Dickmann,
Tim Käseberg,
Jan Meyer,
Sven Burger,
Uwe D. Zeitner,
Bernd Bodermann,
Stefanie Kroker
Publication year - 2020
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.396044
Subject(s) - polarizer , optics , materials science , optoelectronics , ultraviolet , wavelength , physics , birefringence
We demonstrate the retrieval of deep subwavelength structural information in nano-optical polarizers by scatterometry of quasi-bound states in the continuum (quasi-BICs). To this end, we investigate titanium dioxide wire grid polarizers for application wavelengths in the deep ultraviolet (DUV) spectral range fabricated with a self-aligned double-patterning process. In contrast to the time-consuming and elaborate measurement techniques like scanning electron microscopy, asymmetry induced quasi-BICs occurring in the near ultraviolet and visible spectral range provide an easily accessible and efficient probe mechanism. Thereby, dimensional parameters are retrieved with uncertainties in the sub-nanometer range. Our results show that BICs are a promising tool for process control in optics and semiconductor technology.