Open AccessDesign optimization of a 6.4 mm-diameter electromagnetic 2D scanning micromirror
Author(s) -
Sung Yoon Kang,
Jae Hyoung Park,
Chang-Hyeon Ji
Publication year - 2020
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.395903
Subject(s) - gimbal , optics , digital micromirror device , materials science , scanner , fabrication , crosstalk , concentric , electromagnetic coil , physics , medicine , alternative medicine , geometry , mathematics , pathology , quantum mechanics
We present the design optimization, fabrication, and analysis of an electromagnetic biaxial scanning micromirror with 6.4 mm-diameter. The scanner is composed of a micromirror supported by two concentric gimbal structures with unique single turn coil. A cylindrical permanent magnet assembly is placed under the micromirror to provide a radial magnetic field for actuation. Lumped element model parameters and magnetic circuit have been optimized to maximize the driving torque. Fabricated micromirror has been actuated at 300 Hz and 1,010 Hz and maximum optical scan angle of 25.6° and 35.3° have been obtained for the vertical and horizontal scans, respectively. Crosstalk during the actuation has been analyzed, and improved models have been proposed to reduce the crosstalk.