Measurement of complex refractive index with tunable extreme ultraviolet high harmonic source

We report a broadband refractive index measurement method based on a higher harmonic generation tabletop coherent extreme ultraviolet source. We measured the complex refractive index of a sample material by measuring the interference pattern produced by a bare double slit and comparing this with the pattern produced by another double slit with one slit covered by the sample material. We validated the method by measuring the complex refractive index of aluminum in the photon energy range of 63-78 eV using a neon gas jet. The measurement system had errors of less than 0.02%.