Open AccessGap-matching algorithm with the impCEEMDAN in scanning white-light interference microscopy
Author(s) -
Mei Sang,
Xiaojiao Du,
Shuang Wang,
Tianhua Xu,
Jie Dong,
Tiegen Liu
Publication year - 2020
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.391587
Subject(s) - optics , repeatability , interferometry , white light interferometry , interference (communication) , interference microscopy , a priori and a posteriori , algorithm , computer science , coherence (philosophical gambling strategy) , optical coherence tomography , noise (video) , artificial intelligence , physics , mathematics , image (mathematics) , telecommunications , channel (broadcasting) , statistics , philosophy , epistemology , quantum mechanics
Coherence scanning interferometry (CSI) is a common optical measurement method for measuring three-dimensional surface profiles. However, batwings and ghost steps are common obstacles in CSI. In this paper, we proposed a gap-matching algorithm with the improved complete ensemble empirical mode decomposition with adaptive noise (impCEEMDAN) to solve the above two obstacles without any priori knowledge of the surface geometry from the tested sample. A micro-component with 500 nm and 1200 nm step heights and a 10 µm standard step of were used as test samples to evaluate the accuracy of the proposed method. Simulations and experimental results show that this approach can effectively suppress the batwings effect and eliminate the ghost steps. Experiments also confirm that the approach has good accuracy and repeatability.