Open AccessSimple autofocusing method by image processing using transmission images for large-scale two-photon lithography
Author(s) -
Yoko Fujishiro,
Toshiharu Furukawa,
Shoji Maruo
Publication year - 2020
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.390486
Subject(s) - optics , lithography , point spread function , transmission (telecommunications) , voxel , image processing , computer science , materials science , physics , artificial intelligence , image (mathematics) , telecommunications
We propose a simple autofocusing technique that can be introduced into conventional two-photon lithography systems without additional devices. Autofocusing is achieved by image processing using transmission images of photopolymerized voxels. The signal-to-noise ratio of transmission images was improved by optimal low-pass filtering to detect voxels in them. The focal point was detected with an accuracy of about 250 nm from the difference images. Further, we demonstrated mass-fabrication of a 5 × 5 spiral square array with an area of 900 × 900 µm 2 using this method. The method has potential application in constructing low-cost, compact and versatile two-photon lithography apparatus.