Open Access2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy
Author(s) -
Wei Xu,
Weihe Xu,
Nathalie Bouet,
Juan Zhou,
Hanfei Yan,
Xiaojing Huang,
Ajith Pattammattel,
Yuan Gao,
Ming Lu,
Maxim Zalalutdinov,
Yong S. Chu,
Evgeny Nazaretski
Publication year - 2020
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.389555
Subject(s) - optics , lens (geology) , resolution (logic) , x ray optics , materials science , microscopy , microelectromechanical systems , micrometer , optical microscope , image resolution , microscope , optoelectronics , x ray , physics , scanning electron microscope , artificial intelligence , computer science
We report on the development of 2D integrated multilayer Laue lens (MLL) nanofocusing optics used for high-resolution x-ray microscopy. A Micro-Electro-Mechanical-Systems (MEMS) - based template has been designed and fabricated to accommodate two linear MLL optics in pre-aligned configuration. The orthogonality requirement between two MLLs has been satisfied to a better than 6 millidegrees level, and the separation along the x-ray beam direction was controlled on a micrometer scale. Developed planar 2D MLL structure has demonstrated astigmatism free point focus of ∼14 nm by ∼13 nm in horizontal and vertical directions, respectively, at 13.6 keV photon energy. Approaching 10 nm resolution with integrated 2D MLL optic is a significant step forward in applications of multilayer Laue lenses for high-resolution hard x-ray microscopy and their adoption by the general x-ray microscopy community.