Open AccessMultifocal microlens arrays using multilayer photolithography
Author(s) -
Sunghan Bae,
Ki-Soo Kim,
Shiwen Yang,
Kitae Jang,
KiHun Jeong
Publication year - 2020
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.388921
Subject(s) - microlens , photolithography , photomask , materials science , optics , microfabrication , lens (geology) , wafer , focal length , optoelectronics , fabrication , resist , nanotechnology , medicine , physics , alternative medicine , layer (electronics) , pathology