Open AccessSimultaneous measurement of acoustic pressure and temperature using a Fabry-Perot interferometric fiber-optic cantilever sensor
Author(s) -
Ke Chen,
Beilei Yang,
Hong Deng,
Min Guo,
Bo Zhang,
Yang Yang,
Shuai Liu,
Yang Zhao,
Wei Peng,
Qingxu Yu
Publication year - 2020
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.387195
Subject(s) - fabry–pérot interferometer , materials science , cantilever , optics , temperature measurement , optical fiber , pressure measurement , interferometry , fiber optic sensor , pressure sensor , acoustics , optoelectronics , physics , wavelength , quantum mechanics , meteorology , composite material , thermodynamics
A Fabry-Perot (F-P) interferometric fiber-optic cantilever sensor is presented for simultaneous measurement of acoustic pressure and temperature, which are demodulated by a single high-speed spectrometer. The acoustic pressure wave pushes the cantilever to produce periodic deflection, while the temperature deforms the sensor and causes the F-P cavity length to change slowly. The absolute length of the F-P cavity of the fiber-optic cantilever sensor is calculated rapidly by using a spectral demodulation method. The acoustic pressure and temperature are obtained by high-pass filtering and averaging the continuously measured absolute cavity length value, respectively. The experimental results show that the acoustic pressure can be detected with an ultra-high sensitivity of 198.3 nm/Pa at 1 kHz. In addition, an increase in temperature reduces the resonant frequency of the acoustic response and increases the static F-P cavity length. The temperature coefficient of the resonance frequency shift and the temperature response of the sensor are -0.49 Hz/°C and 83 nm/°C, respectively. Furthermore, through temperature compensation, the measurement error of acoustic pressure reaches ± 3%. The proposed dual parameter measurement scheme greatly simplifies the system structure and reduces the system cost.