Open AccessPerformance improvement of Y-doped VOx microbolometers with nanomesh antireflection layer
Author(s) -
Tsu F. Yeh,
Cheng Kang Tsai,
Shao Yu Chu,
Hsin Ying Lee,
Ching-Ting Lee
Publication year - 2020
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.386438
Subject(s) - nanomesh , responsivity , materials science , sputtering , absorptance , optoelectronics , doping , sputter deposition , optics , thin film , graphene , nanotechnology , photodetector , physics , reflectivity