Open AccessTunable terahertz metamaterial absorber actuated by thermomechanical bimaterial microcantilevers
Author(s) -
Jia Xu,
Delin Jia,
Yi Liu,
Yuan Tian,
Xiaomei Yu
Publication year - 2020
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.385948
Subject(s) - terahertz radiation , materials science , metamaterial absorber , metamaterial , optoelectronics , optics , absorption (acoustics) , dielectric , resonator , ground plane , layer (electronics) , substrate (aquarium) , silicon , terahertz spectroscopy and technology , modulation (music) , composite material , tunable metamaterials , philosophy , aesthetics , telecommunications , oceanography , physics , computer science , antenna (radio) , geology
We report a tunable terahertz (THz) metamaterial absorber (MA) actuated by thermomechanical bimaterial microcantilevers. The THz MA, which is suspended on a silicon substrate by the bimaterial microcantilevers, is a sandwich structure with a bottom Al ground plane, middle air and SiN x dielectric layers, and a top Al rotationally symmetric open split ring resonator. Upon application of a current, a Ti heating resistor integrated on the SiN x dielectric layer induces the bimaterial microcantilevers to bend, causing the air layer thickness to change, modulating the absorption of the THz MA. The tunable THz MA exhibited a relative modulation depth of absorption of 28.1% at 0.69 THz and a thermomechanical sensitivity of 0.12°/K. This tunable THz MA has potential applications in filtering, modulation, control, and THz imaging.
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