Open AccessDiamond refractive micro-lenses for full-field X-ray imaging and microscopy produced with ion beam lithography
Author(s) -
Polina Medvedskaya,
Ivan Lyatun,
Sergey Shevyrtalov,
Maxim Polikarpov,
I. Snigireva,
V. Yunkin,
A. Snigirev
Publication year - 2020
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.384647
Subject(s) - optics , ion beam lithography , diamond , materials science , lens (geology) , lithography , microscopy , beamline , x ray optics , focused ion beam , resolution (logic) , ion beam , beam (structure) , physics , x ray , ion , quantum mechanics , artificial intelligence , computer science , composite material
We demonstrate that ion-beam lithography can be applied to the fabrication of rotationally parabolic refractive diamond X-ray micro-lenses that are of interest to the field of high-resolution X-ray focusing and microscopy. Three single half-lenses with curvature radii of 4.8 µm were produced and stacked to form a compound refractive lens, which provided diffraction-limited focusing of X-ray radiation at the P14 beamline of PETRA-III (DESY). As shown with SEM, the lenses are free of expressed low- and high-frequency shape modulations with a figure error of < 200 nm and surface roughness of 30 nm. Precise micro-manipulation and stacking of individual lenses are demonstrated, which opens up new opportunities for compact X-ray microscopy with nanometer resolution.