Open AccessFabrication of concave microlenses on a diamond by a spin coating process
Author(s) -
Yan Liang,
Tianfei Zhu,
Mengjia Xi,
Haris Naeem Abbasi,
Jiao Fu,
Rui Su,
Zhiqiang Song,
Kaiyue Wang,
Hongxing Wang
Publication year - 2020
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.383640
Subject(s) - photoresist , diamond , materials science , microlens , optics , photolithography , etching (microfabrication) , fabrication , coating , spin coating , dry etching , surface finish , surface roughness , optoelectronics , lithography , dewetting , layer (electronics) , nanotechnology , thin film , lens (geology) , composite material , medicine , physics , alternative medicine , pathology